Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2007-03-09
2010-06-08
Wojciechowicz, Edward (Department: 2895)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S353000, C257S401000, C257S627000
Reexamination Certificate
active
07732865
ABSTRACT:
The present invention provides an epitaxial imprinting process for fabricating a hybrid substrate that includes a bottom semiconductor layer; a continuous buried insulating layer present atop said bottom semiconductor layer; and a top semiconductor layer present on said continuous buried insulating layer, wherein said top semiconductor layer includes separate planar semiconductor regions that have different crystal orientations, said separate planar semiconductor regions are isolated from each other. The epitaxial printing process of the present invention utilizing epitaxial growth, wafer bonding and a recrystallization anneal.
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patent: 7060585 (2006-06-01), Cohen et al.
patent: 2005/0116290 (2005-06-01), de Souza et al.
Yang, M., et al., “High Performance CMOS Fabricated on Hybrid Substrate With Different Crystal Orientations”, IBM Semiconductor Research and Development Center, Yorktown Heights, NY.
Yang, M., et al., “On the Integration of CMOS with Hybrid Crystal Orientations”, IBM Semiconductor Research and Development Center, Yorktown Heights, NY.
Yang, M., et al., “High Performance CMOS Fabricated on Hybrid Substrate With Different Crystal Orientations”, IBM Semiconductor Research and Development Center, Yorktown Heights, NY, VLSI Technology, 2004 Digest of Technical Papers, 2004;
Yang, M., et al., “On the Integration of CMOS with Hybrid Crystal Orientations”, IBM Semiconductor Research and Development Center, Yorktown Heights, NY, Electron Devices Meeting, 2003. IEDM '03 Technical Digest.
Furukawa Toshiharu
Radens Carl
Tonti William R.
Williams Richard Q.
Abate Esq. Joseph P.
International Business Machines - Corporation
Scully , Scott, Murphy & Presser, P.C.
Wojciechowicz Edward
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