Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2009-09-09
2010-11-16
Le, Dung A. (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S382000, C257S383000, C257SE21640, C438S653000, C438S675000, C438S677000
Reexamination Certificate
active
07834404
ABSTRACT:
A method of manufacturing a semiconductor device according to the present invention includes the steps of introducing first impurities of a first conductivity type into a main surface of a semiconductor substrate1to form a first impurity region, introducing second impurities of a second conductivity type to form a second impurity region, forming a first nickel silicide film on the first impurity region and forming a second nickel silicide film on the second impurity region, removing an oxide film formed on each of the first and second nickel silicide films by using a mixed gas having an NH3gas and a gas containing a hydrogen element mixed therein, and forming a first conducting film on the first nickel silicide film and forming a second conducting film on the second nickel silicide film, with the oxide film removed.
REFERENCES:
patent: 6008124 (1999-12-01), Sekiguchi et al.
patent: 6022805 (2000-02-01), Sumi
patent: 6686274 (2004-02-01), Shimazu et al.
patent: 7101725 (2006-09-01), Wada et al.
patent: 2005/0181607 (2005-08-01), Aoyama
patent: 2-256235 (1990-10-01), None
patent: 3-116727 (1991-05-01), None
patent: 2001-520463 (2001-10-01), None
patent: 2003-17422 (2003-01-01), None
patent: 2003-133284 (2003-05-01), None
patent: 2003-282530 (2003-10-01), None
patent: 2003-324108 (2003-11-01), None
patent: 99/20812 (1999-04-01), None
Ichinose Kazuhito
Yutani Akie
Le Dung A.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Renesas Electronics Corporation
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