Aperture variable inspection optical system and color filter...

Details Aperture variable inspection optical system and color filter... Aperture variable inspection optical system and color filter...

2007-08-29

2010-10-05

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Focal position of light source

C356S432000

Reexamination Certificate

active

07808625

ABSTRACT:
Disclosed is an aperture variable inspection optical system including a variable aperture unit13having a polygonal light transparent section and light collecting systems12a,12bfor forming an irradiation spot U of light passing through the variable aperture unit13at the position of a sample S. The variable aperture unit13is capable of changing the shape/size of the polygon. The size of the irradiation spot U can be changed without rearranging the aperture unit.

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