Integrated circuit inspection system

Details Integrated circuit inspection system Integrated circuit inspection system

2005-08-31

2010-02-16

Mulpuri, Savitri (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

C438S017000

Reexamination Certificate

active

07662648

ABSTRACT:
Methods and systems that include a nanotube used as an emitter in the testing and fabrication of integrated circuits. The nanotube emits a signal to a substrate. Based on the signal or the electrical properties, e.g., current induced in the substrate by the signal, the region of the substrate is characterized. The characterization includes topology of the region of the substrate such as determining whether a recess in the substrate has a proper depth or other dimensions or characteristics of the substrate.

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