Thin film transistor, method of fabricating the same, and...

Details Thin film transistor, method of fabricating the same, and... Thin film transistor, method of fabricating the same, and...

2007-05-22

2010-11-30

Garber, Charles D (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C257SE21413

Reexamination Certificate

active

07842563

ABSTRACT:
A thin film transistor may include an active layer formed on an insulating substrate and formed with source/drain regions and a channel region; a gate insulating film formed on the active layer; and a gate electrode formed on the gate insulating film. The gate electrode may be formed of a conductive metal film pattern and a conductive oxide film covering the conductive metal film pattern. The source/drain regions may include an LDD region, and the LDD region may at least partially overlap with the gate electrode.

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