Heat transfer assembly

Coating apparatus – Gas or vapor deposition – With treating means

Reexamination Certificate

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Details

C156S345520

Reexamination Certificate

active

07846254

ABSTRACT:
A heat transfer assembly having a heat spreading member sandwiched between a heat source and a heat sink is disclosed. The heat sink, the heat spreading member, and the heat source are pressed against the bottom of a substrate support plate by a bias member.

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“Member.” The American Heritage® Dictionary of the English Language, Fourth Edition. Houghton Mifflin Company, 2004. Aug. 1, 2008. <Dictionary.com http://dictionary.reference.com/browse/member>.

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