Data processing: structural design – modeling – simulation – and em – Simulating nonelectrical device or system
Reexamination Certificate
2006-05-02
2010-10-19
Craig, Dwin M (Department: 2123)
Data processing: structural design, modeling, simulation, and em
Simulating nonelectrical device or system
C716S030000
Reexamination Certificate
active
07818151
ABSTRACT:
A process of obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, is disclosed. Short-range flare is measured from the image to obtain measured short-range flare data. A simulation is performed based on short-range flare model parameters to obtain simulated short-range flare data. The simulated short-range flare data is compared with the measured short range flare data. It is determined whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result. The short-range flare model parameters is optimized according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate.
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Chen Jang Fung
Coskun Tamer
Geh Bernd
Park Sang-bong
ASML MaskTools B.V.
Craig Dwin M
Pillsbury Winthrop Shaw & Pittman LLP
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