Electric heating – Metal heating – By arc
Reexamination Certificate
2007-07-15
2010-10-12
Paschall, Mark H (Department: 3742)
Electric heating
Metal heating
By arc
C219S121430, C219S121540, C118S7230IR, C156S345440
Reexamination Certificate
active
07812278
ABSTRACT:
In one implementation, a method is provided for testing a plasma reactor multi-frequency matching network comprised of multiple matching networks, each of the multiple matching networks having an associated RF power source and being tunable within a tunespace. The method includes providing a multi-frequency dynamic dummy load having a frequency response within the tunespace of each of the multiple matching networks at an operating frequency of its associated RF power source. The method further includes characterizing a performance of the multi-frequency matching network based on a response of the multi-frequency matching network while simultaneously operating at multiple frequencies.
REFERENCES:
patent: 3969666 (1976-07-01), Simon
patent: 4009456 (1977-02-01), Hopfer
patent: 4711983 (1987-12-01), Gerling
patent: 4847460 (1989-07-01), Kieser et al.
patent: 5187454 (1993-02-01), Collins et al.
patent: 5321364 (1994-06-01), Nukiyama et al.
patent: 5521560 (1996-05-01), Burns et al.
patent: 5574410 (1996-11-01), Collins et al.
patent: 5585766 (1996-12-01), Shel
patent: 5629653 (1997-05-01), Stimson
patent: 5654679 (1997-08-01), Mavretic et al.
patent: 5793162 (1998-08-01), Barnes et al.
patent: 5889252 (1999-03-01), Williams et al.
patent: 6066992 (2000-05-01), Sadaka et al.
patent: 6331815 (2001-12-01), Oshima et al.
patent: 6359250 (2002-03-01), Blonigan et al.
patent: 6424099 (2002-07-01), Kirckpatrick et al.
patent: 6469488 (2002-10-01), Hopkins et al.
patent: 6522121 (2003-02-01), Coumou
patent: 6590179 (2003-07-01), Tanaka et al.
patent: 6674293 (2004-01-01), Tsironis
patent: 6700458 (2004-03-01), Mitrovic et al.
patent: 2003/0029567 (2003-02-01), Dhindsa et al.
patent: 2004/0025791 (2004-02-01), Chen et al.
patent: 2004/0210407 (2004-10-01), Quon et al.
patent: 2004/0222184 (2004-11-01), Hayami et al.
patent: 2005/0139321 (2005-06-01), Higashiura
Applied Materials Inc.
Blakely , Sokoloff, Taylor & Zafman LLP
Paschall Mark H
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