Polymer having antireflective properties, hardmask...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

Reexamination Certificate

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Details

C430S317000, C430S323000, C430S272100, C430S271100, C525S398000, C525S402000, C528S151000, C528S152000, C528S153000

Reexamination Certificate

active

07659051

ABSTRACT:
A naphthalene-backbone polymer represented by Formula 1:wherein n and m are independently at least 1 and less than about 190, R1is a hydrogen, a hydroxyl, a hydrocarbon group of about 10 carbons or less, or a halogen, R2is methylene or includes an aryl linking group, R3is a conjugated diene group, and R4is an unsaturated dienophile group.

REFERENCES:
patent: 2004/0241338 (2004-12-01), Foster et al.
patent: 2006/0251990 (2006-11-01), Uh et al.

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