Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2008-10-14
2010-10-05
Kim, Robert (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S306000, C250S307000, C250S310000
Reexamination Certificate
active
07807966
ABSTRACT:
A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed. The angle of aperture of an optical system having a plurality of convergence lenses is changed by changing the convergence lenses and the hole diameter of a diaphragm. The angle α of aperture of the electron beam is changed in accordance with the visual field range corresponding to a single pixel, i.e. what is called the pixel size.
REFERENCES:
patent: 5003173 (1991-03-01), De Jong
patent: 5276331 (1994-01-01), Oae et al.
patent: 6054710 (2000-04-01), Bruggeman
patent: 6946670 (2005-09-01), Zurbrick
patent: 2002/0079448 (2002-06-01), Ishitani et al.
patent: 2002/0125428 (2002-09-01), Krans
patent: 2003/0189172 (2003-10-01), Sawahata et al.
patent: 2004/0183016 (2004-09-01), Sawahata et al.
patent: 2005/0184237 (2005-08-01), Takane et al.
patent: 01-236563 (1989-09-01), None
patent: 02-100252 (1990-04-01), None
patent: 05-258699 (1993-10-01), None
patent: 2003-045925 (2003-02-01), None
Sato, et al., “Evaluation of depth of field in SEM images in terms of the information-passing capacity (IPC) and contrast gradient in SEM image”, Nuclear Instruments and Methods in Physics Research A 519 (2004) 280-285.
Walden, “Analog-to-digital converter survey and analysis”, IEEE Journal of Selected Areas in Communications, vol. 17, No. 4, Apr. 1999.
Japanese Office Action, with English translation, issued in Japanese Patent Application No. 2005-110082, mailed Aug. 11, 2009.
Aoki Kazuo
Kitsuki Hirohiko
Sato Mitsugu
Hitachi High-Technologies Corporation
Kim Robert
Maskell Michael
McDermott Will & Emery LLP
LandOfFree
Scanning electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4175590