Method, apparatus, and system for flash memory

Details Method, apparatus, and system for flash memory Method, apparatus, and system for flash memory

2006-12-29

2010-10-05

Cao, Phat X (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257SE27103

Reexamination Certificate

active

07808053

ABSTRACT:
Embodiments of the present invention provide apparatus, methods and systems that include a substrate including a central region and a peripheral region; a plurality of layers above a surface of the substrate, a first plurality of pitch-multiplied spacers on a top surface of the plurality of layer, the first plurality of pitch-multiplied spacers being above the central region of the substrate, and a second plurality of pitch-multiplied spacers on the top surface of the plurality of layers, the second plurality of pitch-multiplied spacers above the peripheral region and including at least one pitch-multiplied spacer having a surface at a distance from the at least one pitch multiplied spacer having a surface at the boundary.

REFERENCES:
patent: 6833575 (2004-12-01), Parekh et al.
patent: 7115525 (2006-10-01), Abatchev et al.
patent: 7151040 (2006-12-01), Tran et al.
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patent: 2006/0046424 (2006-03-01), Chance et al.
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patent: 2006/0262511 (2006-11-01), Abatchev et al.
patent: 2006/0264001 (2006-11-01), Tran et al.
patent: 2007/0239920 (2007-10-01), Frid

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