Method and apparatus for reviewing defects

Details Method and apparatus for reviewing defects Method and apparatus for reviewing defects

2006-07-03

2010-12-14

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000, C356S237100, C356S237200, C356S237300, C356S237400, C356S237500

Reexamination Certificate

active

07851753

ABSTRACT:
The invention provides an apparatus and a method each capable of highly accurately reviewing at a high speed very small foreign matters and pattern defects occurring during a device production process for forming a circuit pattern on a substrate of semiconductor devices, etc. An objective lens having high NA is installed inside a vacuum chamber for an inspection object having a transparent film formed on the surface thereof and an illumination optical path is formed inside the objective lens so that dark visual field illumination can be made and reflected and scattered light of foreign matters or defects on the surface of the inspection object can be detected with high sensitivity.

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