Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2004-12-20
2010-06-01
Tran, Minh-Loan T (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257SE21520, C257SE29324, C438S052000
Reexamination Certificate
active
07728395
ABSTRACT:
Provided is a micro-mechanical structure and method for manufacturing the same, including a hydrophilic surface on at least a part of a surface of the micro-mechanical structure, so as to prevent generation of an adhesion phenomenon in the process of removing a sacrificial layer to release the micro-mechanical, wherein the sacrificial layer comes into contact with the surface of the micro-mechanical structure.
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Kang Sung Weon
Kim Youn Tae
Yang Woo Seok
Electronics and Telecommunications Research Institute
Kuo W. Wendy
Ladas & Parry LLP
Tran Minh-Loan T
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