Micro electro mechanical system

Details Micro electro mechanical system Micro electro mechanical system

2006-10-20

2010-12-14

Picardat, Kevin M (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S254000, C257S414000, C257S415000, C257S416000, C257S417000, C257S418000, C257S420000, C438S050000, C438S051000, C438S052000, C438S053000, C438S054000, C438S055000

Reexamination Certificate

active

07851876

ABSTRACT:
Embodiments of a micro electro mechanical system are disclosed.

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