Error detection/correction and fault detection/recovery – Data processing system error or fault handling – Reliability and availability
Reexamination Certificate
2007-11-19
2010-12-07
Maskulinski, Michael C (Department: 2113)
Error detection/correction and fault detection/recovery
Data processing system error or fault handling
Reliability and availability
C714S046000, C714S057000
Reexamination Certificate
active
07849363
ABSTRACT:
A troubleshooting support device includes a keyword file storage unit in which keyword files holding keywords constituted with character strings contained in logs related to trouble that occurs in the substrate processing apparatus stored in advance, are stored. A keyword to be used for log search, selected from a keyword file specified based upon input information provided via an input unit, is set and also, a category-specific log file to be used for log analysis is set based upon input information provided via the input unit. Logs in the category-specific log file having been set are extracted and incorporated, and an analysis log file is created by sorting the extracted logs in time sequence. When the logs in the analysis log file are displayed at a display unit, a log containing the keyword having been set is located by searching through the analysis log file and is displayed in a highlighted display.
REFERENCES:
patent: 2002/0050926 (2002-05-01), Lewis et al.
patent: 2006/0224265 (2006-10-01), Nakayama et al.
patent: 2006/0241803 (2006-10-01), Kitamoto et al.
patent: 2009/0055684 (2009-02-01), Jamjoom et al.
patent: 2003-297710 (2003-10-01), None
Mochizuki Hiroaki
Mochizuki Masami
Maskulinski Michael C
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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