MEMS structure support and release mechanism

Details MEMS structure support and release mechanism MEMS structure support and release mechanism

2006-02-02

2010-02-02

Warren, Matthew E (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S595000, C257S602000, C257SE29324

Reexamination Certificate

active

07655996

ABSTRACT:
A MEMS device and method comprising a MEMS structure adjacent to a SOI base; a sacrificial support operatively connecting the base to the MEMS structure; a suspension member operatively connecting the base to the MEMS structure, wherein the suspension member is longer than the sacrificial support; and an electrode operatively connected to the base. The device may further comprise a current pulse generator adapted to send a current pulse through the sacrificial support, wherein the current pulse causes the sacrificial support to detach from the MEMS structure. Moreover, the sacrificial support structures may be electrically resistive.

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