Method of manufacturing an active matrix display device

Details Method of manufacturing an active matrix display device Method of manufacturing an active matrix display device

2003-07-17

2009-06-23

Smith, Zandra V. (Department: 2822)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S161000, C438S622000

Reexamination Certificate

active

07550325

ABSTRACT:
A wiring line is electrically connected in parallel to an auxiliary wiring line via a plurality of contact holes. The contact holes are formed through an insulating film and arranged in vertical direction to the wiring line. Since the auxiliary wiring line is formed in the same layer as an electrode that constitutes a TFT, the electric resistance of the wiring line can be reduced effectively without increasing the number of manufacturing steps.

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