Radiant energy – Irradiation of objects or material
Reexamination Certificate
2007-06-28
2009-12-08
Berman, Jack I (Department: 2881)
Radiant energy
Irradiation of objects or material
C250S492200, C250S50400H, C250S492220, C250S493100, C355S030000
Reexamination Certificate
active
07629593
ABSTRACT:
A lithographic apparatus includes a radiation system constructed to provide a beam of radiation from radiation emitted by a radiation source. The radiation system includes a contaminant trap configured to trap material emanating from the radiation source. The contaminant trap includes a contaminant engaging surface arranged in the path of the radiation beam that receives the material emanating from the radiation source during propagation of the radiation beam in the radiation system. The radiation system also includes a liquid tin cooling system constructed to cooling the contaminant trap with liquid tin. The apparatus includes an illumination system configured to condition the radiation beam, a support constructed to support a patterning device configured to impart the radiation beam with a pattern in its cross-section, a substrate table constructed to hold a substrate, and a projection system configured to project the patterned radiation beam onto a target portion of the substrate.
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Banine Vadim Yevgenyevich
Buis Edwin Johan
Soer Wouter Anthon
Van Empel Tjarko Adriaan Rudolf
Van Herpen Maarten Marinus Johannes Wilhelmus
ASML Netherlands B.V.
Berman Jack I
Ippolito Rausch Nicole
Pillsbury Winthrop Shaw & Pittman LLP
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