Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2007-04-25
2009-10-06
Wells, Nikita (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S492200, C250S492210
Reexamination Certificate
active
07598495
ABSTRACT:
A focusing particle trap system for ion implantation comprising an ion beam source that generates an ion beam, a beam line assembly that receives the ion beam from the ion beam source comprising a mass analyzer that selectively passes selected ions, a focusing electrostatic particle trap that receives the ion beam and removes particles from the ion beam comprising an entrance electrode comprising an entrance aperture and biased to a first base voltage, wherein the first surface of the entrance electrode is facing away from a center electrode and is approximately flat, wherein the second surface of the entrance electrode is facing toward the center electrode and is concave, wherein the center electrode is positioned a distance downstream from the entrance electrode comprising a center aperture and biased to a center voltage, wherein the center voltage is less than the first base voltage, wherein the first surface of the center electrode is facing toward the entrance electrode and is convex, wherein the second surface of the center electrode is facing away from the entrance electrode and is approximately flat, an exit electrode positioned a distance downstream from the center electrode comprising an exit aperture and biased to a second base voltage, and wherein the first surface of the exit electrode is facing toward the center electrode and is approximately flat, wherein the second surface of the exit electrode is facing away from the center electrode and is approximately flat, wherein a first electrostatic field is generated from the entrance electrode toward the center electrode and a second electrostatic field is generated from the exit electrode toward the center electrode; wherein the second base voltage is greater than the center voltage, and an end station that is downstream from the beam line assembly and receives the ion beam.
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Search Report issued on Feb. 8, 2008 in connection with International Application No. PCT/US2007/009272 with a filing date of Apr. 13, 2007.
Benveniste Victor M.
Freer Brian S.
Graf Michael A.
Kellerman Peter L.
Perel Alexander S.
Axcelis Technologies Inc.
Eschweiler & Associates LLC
Smith Johnnie L
Wells Nikita
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