Electrode boat apparatus for processing semiconductor wafers or

Details Electrode boat apparatus for processing semiconductor wafers or Electrode boat apparatus for processing semiconductor wafers or

1987-02-20

1989-01-24

Niebling, John F.

Coating apparatus

Work holders, or handling devices

118728, B05C 1114, B05C 1300

Patent

active

047994517

ABSTRACT:
An electrode boat assembly for holding workpieces to be processed within a chemical reaction process during the chemical vapor process. The electrode boat assembly comprises a plurality of electrode plates held in position by rods and spacer sleeves in order to provide easy assembly and disassembly. Two of the rods are electrically conductive in order to set up plasma field between adjacent electrode plates. Insulating spacer sleeves over the conductive rods preclude plasma formation at unwanted locations. The spacers sleeves and electrode rods have substantially the same coefficient of thermal expansion to minimize warpage and breakage of electrode boat components.

REFERENCES:
patent: 4178877 (1979-12-01), Kudo
patent: 4223048 (1980-09-01), Engle, Jr.
patent: 4287851 (1981-09-01), Dozier

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