Photosensitive compound, photosensitive composition, resist...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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C430S905000, C430S907000, C430S325000, C430S326000, C430S311000, C430S312000, C430S313000, C430S314000, C430S316000, C549S283000, C549S288000, C549S289000, C549S290000, C549S399000, C525S386000, C525S480000, C525S333300

Reexamination Certificate

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07615332

ABSTRACT:
A photosensitive compound has two or more structural units, in a molecule, represented by the following general formula (1):wherein R1to R5are selected from the group consisting of hydrogen atom, halogen atom, alkyl group, alkoxy group, acetoxy group, phenyl group, naphthyl group, and alkyl group in which a part or all of hydrogen atoms are substituted with fluorine atom; and X is a substituted or unsubstituted phenylene group or a substituted or unsubstituted naphthylene group.

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