Semiconductor device and method for forming the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S493000, C257S342000, C257SE29024, C438S286000

Reexamination Certificate

active

07550804

ABSTRACT:
A semiconductor device may include a semiconductor substrate having a first dopant type. A first semiconductor region within the semiconductor substrate may have a plurality of first and second portions (44, 54). The first portions (44) may have a first thickness, and the second portions (54) may have a second thickness. The first semiconductor region may have a second dopant type. A plurality of second semiconductor regions (42) within the semiconductor substrate may each be positioned at least one of directly below and directly above a respective one of the first portions (44) of the first semiconductor region and laterally between a respective pair of the second portions (54) of the first semiconductor region. A third semiconductor region (56) within the semiconductor substrate may have the first dopant type. A gate electrode (64) may be over at least a portion of the first semiconductor region and at least a portion of the third semiconductor region (56).

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Nassif-Khalil et al., “Super Junction LDMOST in Silicon-On-Sapphire Technology (SJ-LDMOST)”, ISPSD IEEE, pp. 81-84, 2002.
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Nassif-Khalil, Sameh and Salama, Andre, Super Junction, LDMOST in Silicon-On-Sapphire Technology (SJ-LDMOST) ISPSD pp. 81-84, 2002.

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