Standard specimen for a charged particle beam apparatus,...

Details Standard specimen for a charged particle beam apparatus,... Standard specimen for a charged particle beam apparatus,...

2007-03-13

2009-11-24

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S252100

Reexamination Certificate

active

07622714

ABSTRACT:
An object of the present invention is to provide a standard specimen for a charged particle beam enabling highly precise measurement of sub-micron to several 10 μm in size on an image and an apparatus using the standard specimen. In order to attain the above described object, the present invention provides a standard specimen for a charged particle beam including two different specimens for magnification or measurement calibration and a charged particle beam apparatus using the specimens.

REFERENCES:
patent: 6750447 (2004-06-01), Houge et al.
patent: 6875982 (2005-04-01), Bedell et al.
patent: 7-71947 (1995-03-01), None
patent: 8-31363 (1996-02-01), None
patent: 2003-279321 (2003-10-01), None
Nakayama, “Inspection and Measurement of ULSI Pattern by Electron-Beam System”, The Journal of the Japan Society for Precision Engineering, 2002, pp. 342-344, vol. 68, No. 3. (Relevant Portions translated).
Misumi, et al., “Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope”, Measurement Science and Technology, 2003, pp. 463-471, vol. 14, Institute of Physics Publishing Ltd., UK.
“MAG*I*CAL® TEM Calibration Specimen: Certificate of Traceability”, Structure Probe, Inc. Supplies, 2006, <http://www.2spi.com/catalog/standards/magical—cert—trace.html>.

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