MEMS resonator and method of enhancing an output signal...

Details MEMS resonator and method of enhancing an output signal... MEMS resonator and method of enhancing an output signal...

2006-10-17

2009-08-25

Nguyen, Cuong Q (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S416000, C257S417000, C257S420000, C257S418000, C257S419000, C333S186000, C333S187000, C333S188000, C333S189000

Reexamination Certificate

active

07579662

ABSTRACT:
The resonator comprises two capacitively coupled electrodes. One of the electrodes is made of a p-type doped semiconductor material, whereas the other electrode is made of an n-type doped semiconductor material. The invention also comprises a method of using this specific selection of the doping for enhancing the output signal current from a resonator.

REFERENCES:
patent: 6238946 (2001-05-01), Ziegler
patent: 2005/0073078 (2005-04-01), Lutz et al.
patent: 2006/0049895 (2006-03-01), Tada et al.
patent: 1585219 (2004-04-01), None
Nguyen C T-C: “Vibrating RF MEMS for Next Generation Wireless Applications” Custom Integrated Circuits Conference, 2004. Proceedings of the IEEE 2004 Orlando, FL, USA Oct. 3-6, 2004, Piscataway, NJ, USA, IEEE, Oct. 3, 2004, pp. 257-264, XP010742287 ISBN: 0-7803-8495-4.
Nguyen C T C: “Micromachining Technologies For Miniaturized Communciation Devices” Proceedings of the SPIE, SPIE, Bellingham, VA, US, vol. 3511, Sep. 21, 1998, pp. 24-38, XP001085288, ISSN: 0277-786X.

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