X-ray microscope

Details X-ray microscope X-ray microscope

1993-12-22

1995-09-12

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Telescope or microscope

378 63, G21K 700

Patent

active

054504635

ABSTRACT:
An X-ray microscope for observing a transmitted X-ray microscopic image of a specimen by irradiating the specimen with X-rays and exciting radiation rays, in which the exciting radiation rays are made incident upon the specimen at a large photon flux in an efficient manner without loss, so that a contrast of the image can be increased. The invention provides a desired relationship between thickness of specimen, wavelength of X-rays and tone resolving power of image for obtaining a transmitted X-ray microscopic image having an excellent contrast. The invention further proposes optimizations for a photon flux of exciting radiation rays as well as for a timing of irradiation of X-rays and exciting radiation rays. The X-ray microscope can observe particular element contained in particular substance without being affected by the same element contained in other substances which constitute a specimen together with the particular substance by suitably selecting a wavelength of the exciting radiation rays. The invention further propose a secondary electron microscope, in which a specimen is irradiated with X-rays and exciting radiation rays and secondary electrons emitted from the specimen are detected by an electron monochrometer.

REFERENCES:
patent: 5216699 (1993-06-01), Iketaki
patent: 5226065 (1993-07-01), Held et al.
Klems, "X-ray Absorption in Valence-excited Molecules as a Possible Contrast Mechanism for Chemically Sensitive Imaging and Spectroscopy", Feb. 15, 1991, pp. 2041-2045, Physical Review A, vol. 43, No. 4.
Henke, et al, "Low-Energy X-Ray Interaction Coefficients: Photoabsorption, Scattering, and Reflection", pp. 1 and 27, Copyright 1982 by Academic Press, Inc.
Krause, "Atomic Radiative and Radiationless Yields for K and L Shells", 1979, pp. 307-327, J. Phys. Chem. Ref. Data, vol. 8, No. 2.
Campbell, et al, "K.alpha.,K.beta., and Radiative Auger Photon Intensities in K X-Ray Spectra from Atoms in the 20.ltoreq.Z.ltoreq.40 Region", Apr. 1986, pp. 2410-2417, Physical Review A, vol. 33, No. 4.
Aoki, "X-Ray Optical Elements and Their Applications", pp. 342-351, Institute of Applied Physics, University of Tsukuba, 1986.
Borghesi, et al, "Graphite (C)", Handbook of Optical Constants of Solids (1991), pp. 449-460.

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