Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2005-12-28
2009-06-09
Dinh, Paul (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C716S030000
Reexamination Certificate
active
07546564
ABSTRACT:
A method for verifying optical proximity correction (OPC) using a layer-versus-layer (LVL) comparison. The method includes performing optical proximity correction of an original design of a semiconductor device to prepare a revised design of the semiconductor device; comparing the revised design and the original design with each other; dividing deviation patterns, obtained by results of the comparison, according to an illuminating system; and comparing the divided deviation patterns respectively to reference values to determine whether or not any error in the optical proximity correction occurs.
REFERENCES:
patent: 6077310 (2000-06-01), Yamamoto et al.
patent: 6451680 (2002-09-01), Wang
patent: 6934929 (2005-08-01), Brist et al.
patent: 7175940 (2007-02-01), Laidig et al.
patent: 2003/0140330 (2003-07-01), Tanaka et al.
patent: 2005/0008942 (2005-01-01), Cheng et al.
patent: 2005/0153217 (2005-07-01), Izuha et al.
patent: 2005/0219515 (2005-10-01), Morohoshi
patent: 2006/0008135 (2006-01-01), Nojima
patent: 2007/0042277 (2007-02-01), Hsu et al.
patent: 2007/0061773 (2007-03-01), Ye et al.
patent: 2007/0162889 (2007-07-01), Broeke et al.
patent: 10273717 (2000-04-01), None
patent: 2002212945 (2004-02-01), None
patent: 2002326056 (2004-06-01), None
patent: 2003180447 (2005-01-01), None
Dinh Paul
Hynix / Semiconductor Inc.
Parihar Suchin
Townsend and Townsend / and Crew LLP
LandOfFree
Method for verifying optical proximity correction using... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for verifying optical proximity correction using..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for verifying optical proximity correction using... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4112577