Mechanical-quantity measuring device

Details Mechanical-quantity measuring device Mechanical-quantity measuring device

2006-02-09

2009-02-03

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C073S760000, C073S761000, C073S763000, C073S774000

Reexamination Certificate

active

07484422

ABSTRACT:
A mechanical-quantity measuring device capable of measuring a strain component of structure deformation for an object to be measured in a particular desired direction with long life, high reliability and high precision. A strain sensor is formed on a semiconductor substrate. Impurity-diffused layers considering the crystal orientation of the semiconductor single crystalline substrate are used to form a Wheatstone bridge circuit on the substrate. The Wheatstone bridge circuit can operate on one substrate since the semiconductor single crystal has the anisotropy of piezoresistance effect.

REFERENCES:
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patent: 5583295 (1996-12-01), Nagase et al.
patent: 6988412 (2006-01-01), Wilner
patent: 7109568 (2006-09-01), Kumagai et al.
patent: 7146865 (2006-12-01), Wilner
patent: 07-270109 (1995-10-01), None

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