Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1986-02-21
1987-10-13
Lindsay, Robert L.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
148DIG106, 148DIG114, 156657, 437 52, 437241, B44C 122
Patent
active
046996907
ABSTRACT:
A method of producing a semiconductor memory device comprises the steps of forming a first mask on a substrate and forming an opening in the first mask, implanting impurity ions into the substrate from the opening in the first mask so as to form an impurity region, forming a side wall layer of oxidation-resistant material having a predetermined width on a side surface of the opening in the first mask, forming a tunnel region having a width determined by the predetermined width by using the oxidation-resistant side wall layer as a second mask and forming a gate part on the tunnel region.
REFERENCES:
patent: 4080718 (1978-03-01), Richman
patent: 4224733 (1980-09-01), Spadea
patent: 4376658 (1983-03-01), Sigusch
patent: 4507853 (1985-04-01), McDavid
patent: 4548834 (1985-10-01), Tsunge et al.
patent: 4597827 (1986-07-01), Nishitani
Fujitsu Limited
Lindsay Robert L.
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