Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2006-03-03
2009-08-25
Cleveland, Michael (Department: 1792)
Coating apparatus
Gas or vapor deposition
With treating means
C118S7230ER, C118S7230IR
Reexamination Certificate
active
07578258
ABSTRACT:
An apparatus for selectively pre-coating a plasma processing chamber, including a chamber wall is disclosed. The apparatus includes a first set of RF electrodes, the first set of RF electrodes configured to strike a first pre-coat plasma, the first set of RF electrodes defining a first plasma chamber zone. The apparatus also includes a first set of confinement rings disposed around the first set of RF electrodes; and a second set of confinement rings disposed between the first set of confinement rings and the chamber wall. The apparatus further includes a gas delivery system configured to apply a first pre-coat layer to the first plasma zone when a first pre-coat gas is delivered and the first set of RF electrodes is energized. The apparatus also includes the gas delivery system configured to apply a second pre-coat layer to the second plasma zone when a second pre-coat gas is delivered and the second set of RF electrodes is energized.
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Chen Keath T
Cleveland Michael
IP Strategy Group, P.C.
Lam Research Corporation
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