Method of classifying defects using multiple inspection...

Details Method of classifying defects using multiple inspection... Method of classifying defects using multiple inspection...

2004-01-20

2009-10-13

Mehta, Bhavesh M (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

07602962

ABSTRACT:
The present invention provides a method of classifying defects wherein defects are detected in a first inspection machine. The detected defects are then reviewed by a second inspection machine. A sampling rate for review by the second inspection machine is determined by a defect classifier in the first inspection machine.

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