Method for forming a cantilever and tip

Details Method for forming a cantilever and tip Method for forming a cantilever and tip

2004-06-28

2009-02-24

Olsen, Allan (Department: 1792)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C216S011000, C216S062000

Reexamination Certificate

active

07494593

ABSTRACT:
A method is disclosed for forming a single crystal cantilever and tip on a substrate. The method can include the operation of defining an implant area on the substrate with a layer of photoresist. A further operation can be implanting oxygen into the substrate in the implant area to a predetermined depth to form a buried oxide layer. The buried oxide layer can define a bottom of the single crystal cantilever and tip. Another operation can involve shaping the single crystal cantilever and tip from the substrate above the buried oxide layer.

REFERENCES:
patent: 4968585 (1990-11-01), Albrecht et al.
patent: 5026437 (1991-06-01), Neukermans et al.
patent: 5594166 (1997-01-01), Itoh et al.
patent: 5614663 (1997-03-01), Itoh et al.
patent: 5618760 (1997-04-01), Soh et al.
patent: 5633455 (1997-05-01), Quate
patent: 5856672 (1999-01-01), Ried
patent: 5959200 (1999-09-01), Chui et al.
patent: 6000947 (1999-12-01), Minne et al.
patent: 6066265 (2000-05-01), Galvin et al.
patent: 6136208 (2000-10-01), Chou et al.
patent: 6156216 (2000-12-01), Manalis et al.
patent: 6428713 (2002-08-01), Christenson et al.
patent: 6458206 (2002-10-01), Givargizov et al.
patent: 6886395 (2005-05-01), Minne
patent: 7010966 (2006-03-01), Kitazawa et al.
patent: 2002/0178799 (2002-12-01), Kitazawa et al.
patent: WO 03/087709 (2003-10-01), None

Affiliated with

Also associated with

Rating

Method for forming a cantilever and tip does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for forming a cantilever and tip, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for forming a cantilever and tip will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4084494