Physical quantity sensor

Details Physical quantity sensor Physical quantity sensor

2007-11-01

2009-12-08

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S504140, C073S001380

Reexamination Certificate

active

07628073

ABSTRACT:
A physical quantity sensor includes: a substrate; a movable element; two fixed elements; a carrier wave application element for applying two carrier waves to the fixed elements; a signal application element for applying a middle voltage to the movable element; and a detection circuit for detecting a physical quantity. The detection circuit executes a first self diagnosis process when the signal application element further applies a first self diagnosis signal to the movable element. The first self diagnosis signal has a first frequency for obtaining a resonant magnification equal to or larger than 1.1 times with respect to a resonant frequency of the movable element, so that the movable element is resonated and almost contacts or press contacts one fixed element. The detection circuit determines whether a sticking phenomenon occurs when the signal application element applies the first self diagnosis signal.

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