Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2007-09-04

2009-10-13

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S306000

Reexamination Certificate

active

07601955

ABSTRACT:
A scanning electron microscope is provided. The scanning electron microscope includes an electron beam source generating a primary electron beam, a condenser lens converging the primary electron beam, a base plate with a diamond film formed on the surface thereof having an aperture for passing of the primary electron beam, and a scanning unit two-dimensionally scanning a specimen with the primary electron beam.

REFERENCES:
patent: 5872358 (1999-02-01), Todokoro et al.
patent: 1643648 (2005-07-01), None

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