Lithographic apparatus

Details Lithographic apparatus Lithographic apparatus

2008-08-11

2009-11-03

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S071000

Reexamination Certificate

active

07612867

ABSTRACT:
A lithographic apparatus including means for selectively transmitting a projection beam before imaging the patterned projection beam onto a substrate. The means may include any of the following: a selectively transmitting device disposed downstream of a patterning device in the direction of the projection beam, a fixed and a moving set of masking blades in a scanning system or an array of switchable elements. The means may be provided to a mask table/holder or to a frame or structure of the lithographic projection apparatus.

REFERENCES:
patent: 4589769 (1986-05-01), Matsuki
patent: 5295017 (1994-03-01), Brown
patent: 5638211 (1997-06-01), Shiraishi
patent: 5712698 (1998-01-01), Poschenrieder et al.
patent: 5760881 (1998-06-01), Miyazaki et al.
patent: 5780861 (1998-07-01), Apelgren et al.
patent: 6078381 (2000-06-01), Suzuki
patent: 6200709 (2001-03-01), Nuytkens et al.
patent: 6204911 (2001-03-01), Kurosawa et al.
patent: 6307619 (2001-10-01), Galburt et al.
patent: 6359678 (2002-03-01), Ota
patent: 6555274 (2003-04-01), Kye et al.
patent: 6600166 (2003-07-01), Sato et al.
patent: 6661498 (2003-12-01), Hirukawa
patent: 6721033 (2004-04-01), Kaneko
patent: 2001/0024269 (2001-09-01), Koide et al.
patent: 2002/0014600 (2002-02-01), Sato et al.
patent: 2002/0043321 (2002-04-01), Shida et al.
patent: 2002/0045113 (2002-04-01), Pril et al.
patent: 2002/0131030 (2002-09-01), Ouchi
patent: 2002/0154284 (2002-10-01), Sato
patent: 2002/0176065 (2002-11-01), Pierrat
patent: 2003/0020893 (2003-01-01), Kawashima
patent: 2003/0031017 (2003-02-01), Tsuji
patent: 1 061 561 (2000-12-01), None
patent: 62-92959 (1987-04-01), None
patent: 64-71123 (1989-03-01), None
patent: 1-091419 (1989-04-01), None
patent: 3-011613 (1991-01-01), None
patent: 3-085543 (1991-04-01), None
patent: 3-222319 (1991-10-01), None
patent: 6-077112 (1994-03-01), None
patent: 8-055795 (1996-02-01), None
patent: 10-209017 (1998-08-01), None
patent: 10-209032 (1998-08-01), None
patent: 10-284371 (1998-10-01), None
patent: 2001-217178 (2001-08-01), None
patent: 2002-043214 (2002-02-01), None
patent: 2003-045784 (2003-02-01), None
Office Action in Japanese Patent Application No. 2004-157062, dated Jun. 15, 2007.
European Search Report dated Mar. 3, 2004.

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