Process for manufacturing an apparatus that protects...

Details Process for manufacturing an apparatus that protects... Process for manufacturing an apparatus that protects...

Filed on

2006-06-19

Date issued

2008-11-18

Examiner

Le, Dung A. (Department: 2818)

Patent Class

Semiconductor device manufacturing: process

SubClass

Making device or circuit responsive to nonelectrical signal

SubSubClass

Physical stress responsive

Other Related Categories

C438S053000, C438S050000, C438S048000

Type

Reexamination Certificate

Status

active

Patent number

07452741

Description

ABSTRACT:
The present invention provides a process for manufacturing an apparatus. The process, in one embodiment, includes providing a micro-electro-mechanical system (MEMS) device, the micro-electro-mechanical system (MEMS) device including an actuator coupled to a movable feature, sacrificial material fixing the actuator and movable feature with respect to one another, and a layer of material located over the actuator, movable feature and sacrificial material. The process may further include removing only a portion of the layer of material to expose the sacrificial material, and subjecting the exposed sacrificial material to an etchant to release the movable feature.

REFERENCES:
patent: 6210988 (2001-04-01), Howe et al.
patent: 2007/0138582 (2007-06-01), Nystrom et al.
patent: 2007/0222007 (2007-09-01), Van Beek et al.

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