Piezoelectric driving type MEMS apparatus

Details Piezoelectric driving type MEMS apparatus Piezoelectric driving type MEMS apparatus

2005-04-07

2008-12-16

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

Reexamination Certificate

active

07466060

ABSTRACT:
A piezoelectric driving type MEMS apparatus includes: a supporting portion provided on a substrate; and a piezoelectric actuator, which is supported on the supporting portion, including a piezoelectric film and a driving electrode configured to drive the piezoelectric film, the piezoelectric film in the piezoelectric actuator having at least one slit extending along a longitudinal direction of the piezoelectric actuator.

REFERENCES:
patent: 6217159 (2001-04-01), Morikoshi et al.
patent: 6700307 (2004-03-01), Kitahara
patent: 8-187848 (1996-07-01), None
patent: 10-209519 (1998-08-01), None

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