Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2007-07-24
2008-11-25
Bella, Matthew C. (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S147000, C382S149000, C382S141000, C348S087000, C348S126000, C356S237100
Reexamination Certificate
active
07457453
ABSTRACT:
A pattern inspection apparatus including: an image detecting part for detecting a digital image of an object substrate; a display having a screen on which the digital image of the object substrate and/or a distribution of defect candidates in a map form are displayable; an input device for inputting information of a non-inspection region to be masked on the object substrate by defining a region on the screen on which said distribution of defect candidates is displayed in a map form; a memory part for storing coordinate data, pattern data or feature quantity data of the non-inspection region to be masked on the object substrate inputted on the screen by the input device; and a defect judging part in which the digital image detected by the image detecting part is examined in a state that a region matching with a condition stored in the memory part is masked and a defect is detected in a region other than said masked region.
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Hiroi Takashi
Kuni Asahiro
Miyai Hiroshi
Nara Yasuhiko
Shishido Chie
Antonelli, Terry Stout & Kraus, LLP.
Bella Matthew C.
Hitachi , Ltd.
Strege John B
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