Semiconductor device and method for fabricating the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C257S484000, C257SE29013, C257SE23002

Reexamination Certificate

active

07453128

ABSTRACT:
A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.

REFERENCES:
patent: 5652459 (1997-07-01), Chen
patent: 5889314 (1999-03-01), Hirabayashi
patent: 5900763 (1999-05-01), Rahim et al.
patent: 6022791 (2000-02-01), Cook et al.
patent: 6163065 (2000-12-01), Seshan et al.
patent: 6509622 (2003-01-01), Ma et al.
patent: 6552433 (2003-04-01), Chou et al.
patent: 6870265 (2005-03-01), Kurimoto et al.
patent: 2002/0167071 (2002-11-01), Wang
patent: 2003/0020098 (2003-01-01), Sasaki
patent: 2003/0122220 (2003-07-01), West et al.
patent: 2003/0137050 (2003-07-01), Chambers et al.
patent: 2003/0160261 (2003-08-01), Moriya
patent: 2003/0218254 (2003-11-01), Kurimoto et al.
patent: 2004/0026785 (2004-02-01), Tomita
patent: 2004/0099877 (2004-05-01), Towle et al.
patent: 2004/0150070 (2004-08-01), Okada et al.
patent: 1407620 (2003-04-01), None
patent: 3-227539 (1991-10-01), None
patent: 4-179246 (1992-06-01), None
patent: 6-181233 (1994-06-01), None
patent: 10-98014 (1998-04-01), None
patent: 2000-277465 (2000-10-01), None
patent: 2001-23937 (2001-01-01), None
patent: 2002-134506 (2002-05-01), None
patent: 2002-289689 (2002-10-01), None
patent: 2003-86590 (2003-03-01), None
patent: 2002-353307 (2002-12-01), None
Chinese Office Action (and English translation) issued in Chinese Patent Application No. CN 200410088940.7, dated Feb. 15, 2008.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Semiconductor device and method for fabricating the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device and method for fabricating the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device and method for fabricating the same will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4026371

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.