Thermal measuring and testing – Thermal calibration system
Reexamination Certificate
2007-08-21
2008-11-18
Lefkowitz, Edward (Department: 2855)
Thermal measuring and testing
Thermal calibration system
C374S121000
Reexamination Certificate
active
07452125
ABSTRACT:
A system and method for calibrating a pyrometer used in temperature detection in a chemical vapor deposition system is provided. A calibration wafer with a reference region including a metal such as Al or Ag for forming a eutectic, and an exposed non-reference region without such a metal, are provided. Reflectivity measurements are taken from the reference region, and temperature measurements are taken from the non-reference region, over a range of temperatures including a known melting point for the metal eutectic. The pyrometer is calibrated based on the correlation of the known eutectic melting point with the change in reflectivity data obtained in the reference region, in light of the temperature data obtained from the non-reference region.
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Belousov Mikhail
Gurary Alexander I.
Volf Boris
Jagan Mirellys
Lefkowitz Edward
Lerner David Littenberg Krumholz & Mentlik LLP
Veeco Instruments Inc.
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