Micro oscillating element

Details Micro oscillating element Micro oscillating element

2005-12-01

2008-11-18

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C359S225100

Reexamination Certificate

active

07453182

ABSTRACT:
A micro oscillating element is formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer. This oscillating element includes an oscillation section, an oscillation section supporting frame, and a torsional joining section. The oscillation section includes a movable functional section. The torsional joining section joins the oscillation section and the frame, and also defines an oscillation axis for oscillating action of the oscillation section. The movable functional section is a part formed in the first conductive layer, while the frame is a part formed in the second conductive layer.

REFERENCES:
patent: 5740150 (1998-04-01), Uchimaru et al.
patent: 6287885 (2001-09-01), Muto et al.
patent: 6870300 (2005-03-01), Bolle et al.
patent: 9-146032 (1997-06-01), None
patent: 9-146034 (1997-06-01), None
patent: 10-190007 (1998-07-01), None
patent: 2000-31502 (2000-01-01), None

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