Polymer composition for photoresist application

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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430285, 430287, 522 93, 522104, 522106, 522108, 522904, 522905, 525 10, 525 33, 525921, G03C 170

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048371262

ABSTRACT:
The novel polymers disclosed have the formula: ##STR1## wherein R.sub.1 is R.sub.5 --(z).sub.p ; R.sub.5 is a terminal reactive group --O--; z is --isocyanate--O--; p is zero or 1, however p is zero when m is zero; P .sub.1 is an organic radical; m is zero or 1, however m is zero when n is 1; R.sub.2 is an organic radical; i is an integer from 2 to 6; P.sub.2 is an organic radical; r is zero or 1, however r is zero only when m is zero and n is zero; R.sub.3 is an organic radical; P.sub.4 is the residue from a polyhydroxy compound; n is zero or 1; R.sub.4 is --(v).sub.w --R.sub.6 ; v is --O--isocyanate; w is zero or 1, however, w is zero when m is zero; and R.sub.6 is --O-- terminal reactive group. The polymers are preferably made by first reacting a dianhydride with a polymer having terminal hydroxy groups and then reacting the reaction product with a hydroxy group terminated acrylate or methacrylate or a hydroxy group terminated hydrogen donor containing at least one heterogeneous atom such as O, N, or S. Polymer compositions comprising these polymers have been found to be very useful as photoresists in producing printed circuit boards.

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