Thin film transistor substrate and manufacturing method for...

Details Thin film transistor substrate and manufacturing method for... Thin film transistor substrate and manufacturing method for...

2008-01-30

2008-10-07

Booth, Richard A. (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C257SE21561

Reexamination Certificate

active

07432138

ABSTRACT:
A thin film transistor substrate is provided whose structure allows for the formation of (i) a thick gate insulating film, (ii) a high pressure resistance TFT having a LDD region of a GOLD structure, and (iii) a low voltage TFT having a thin gate insulating film, with less number of production steps.

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Hotta; “Thin Film Transistor Substrate and Manufacturing Method for the Same”, U.S. Appl. No. 11/420,621; filed May 26, 2006.

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