Semiconductor device manufacturing: process – Making passive device – Resistor
Reexamination Certificate
2005-05-18
2008-08-05
Ghyka, Alexander G (Department: 2812)
Semiconductor device manufacturing: process
Making passive device
Resistor
C438S013000, C438S017000, C438S463000, C219S121670, C219S121680, C257SE21599
Reexamination Certificate
active
07407861
ABSTRACT:
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.
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Chu Yun Fee
Couch Bruce L.
Ehrmann Jonathan S.
Johnson Shepard D.
Lento Joseph V.
Brooks & Kushman, PC.
Ghyka Alexander G
GSI Group Corporation
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