Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2005-10-28
2008-08-05
Vanore, David A. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S306000, C250S309000, C250S310000, C250S311000, C250S399000, C250S492300
Reexamination Certificate
active
07408154
ABSTRACT:
As measurement accuracy required for the scanning electron microscope (SEM) for measuring a pattern width becomes stringent, a technique of reducing the difference in a measured dimension between the SEM's is desired. However, the conventional technique of evaluating the difference in a measured dimension between the SEM's cannot separate the difference in a measured dimension between the SEM's themselves and a dimensional change resulting from deformation of the pattern itself. Moreover, the technique of reducing the difference in a measured dimension between the SEM's needs an operator for reducing the difference in a measured dimension between the SEM's for each measurement pattern shape. In this invention, a pattern at the same position is measured for a plurality of times with each SEM, and a different between extrapolated values of measured values obtained by the respective SEM's is calculated, whereby separation between the difference in a measured dimension between the SEM's and a dimensional change resulting from deformation of the pattern itself is made possible. Moreover, matching electron beam image profiles between the SEM's using an operator that simulates a difference in beam diameter between the SEM's makes it possible to reduce the difference in a measured dimension between the SEM's, not depending on a dimensional measurement pattern shape.
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Kawada Hiroki
Maeda Tatsuya
Oosaki Mayuka
Shishido Chie
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Souw Bernard
Vanore David A.
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