Methods of making electromechanical three-trace junction...

Details Methods of making electromechanical three-trace junction... Methods of making electromechanical three-trace junction...

Filed on

2005-07-25

Date issued

2008-09-02

Examiner

Hoang, Quoc D (Department: 2892)

Patent Class

Semiconductor device manufacturing: process

SubClass

Making device or circuit responsive to nonelectrical signal

SubSubClass

Physical stress responsive

Other Related Categories

C438S050000, C257SE21038, C257SE51023

Type

Reexamination Certificate

Status

active

Patent number

07419845

Description

ABSTRACT:
Methods of producing an electromechanical circuit element are described. A lower structure having lower support structures and a lower electrically conductive element is provided. A nanotube ribbon (or other electromechanically responsive element) is formed on an upper surface of the lower structure so as to contact the lower support structures. An upper structure is provided over the nanotube ribbon. The upper structure includes upper support structures and an upper electrically conductive element. In some arrangements, the upper and lower electrically conductive elements are in vertical alignment, but in some arrangements they are not.

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