Method for correcting distortions in electron backscatter...

Details Method for correcting distortions in electron backscatter... Method for correcting distortions in electron backscatter...

2006-04-05

2008-10-28

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S307000, C250S492300, C250S492220, C250S550000, C382S141000, C382S151000, C382S216000, C382S296000

Reexamination Certificate

active

07442930

ABSTRACT:
A method is provided for correcting magnetic field distortions in an electron backscatter diffraction (EBSD) pattern. An EBSD pattern is firstly generated from a sample placed within an electron microscope. A predetermined representation of a magnetic field in the microscope is used to calculate the trajectories of electrons in the microscope, for different emergence angles. A corrected EBSD pattern is then calculated using the calculated trajectories, the corrected EBSD pattern representing the EBSD pattern if the microscope magnetic field were substantially absent.

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patent: 6590209 (2003-07-01), Bajt
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patent: 2004/0188610 (2004-09-01), Hirose
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