Alignment method, method of measuring front to backside...

Details Alignment method, method of measuring front to backside... Alignment method, method of measuring front to backside...

2004-07-28

2008-09-02

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C430S022000, C430S030000

Reexamination Certificate

active

07420676

ABSTRACT:
In a method of measuring front to backside alignment error according to one embodiment, a transparent substrate has a plurality of marks on both the front and backside. The relative location of the marks on the front and backside of the substrate is determined to calculate the front to backside alignment error for the whole substrate. In a further embodiment, the substrate is rotated by 180° within the plane of the substrate and the front relative location of the marks is again determined.

REFERENCES:
patent: 5298988 (1994-03-01), Everett et al.
patent: 5929997 (1999-07-01), Lin
patent: 6376329 (2002-04-01), Sogard et al.
patent: 7057707 (2006-06-01), Hansen
patent: 7292339 (2007-11-01), Lof
patent: 2002/0109825 (2002-08-01), Gui et al.
patent: 1341046 (2003-09-01), None

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