Method and apparatus for testing function of active...

Details Method and apparatus for testing function of active... Method and apparatus for testing function of active...

2002-04-04

2008-05-20

Nguyen, Vincent Q. (Department: 2858)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

C324S754120, C324S754120, C324S765010

Reexamination Certificate

active

07375505

ABSTRACT:
A method and an apparatus for testing the function of a plurality of microstructural elements by irradiation with particle radiation. All of the microstructural elements detected as malfunctioning are listed in a first error list in a first test sequence. The microstructural elements listed in the first error list are tested once more in at least one further test sequence and at least the result of the test sequence last carried out is evaluated to establish the overall test result. The first test sequence is designed so that, if possible, all of the microstructural elements which are actually malfunctioning are detected. The invention further relates to a method for producing microstructural elements which are constructed as a plurality on a substrate and are tested according to the above test method.

REFERENCES:
patent: 5834773 (1998-11-01), Brunner et al.
patent: 6304095 (2001-10-01), Miyamoto

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