Fabrication of a high fill ratio reflective spatial light...

Details Fabrication of a high fill ratio reflective spatial light... Fabrication of a high fill ratio reflective spatial light...

2007-07-03

2008-09-23

Choi, William C. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S237000, C359S900000, C216S002000

Reexamination Certificate

active

07428094

ABSTRACT:
A method of fabricating a spatial light modulator. The method includes forming cavities in a first substrate and fabricating electrodes on a second substrate. The method also includes bonding the first substrate to the second substrate and forming a mirror plate from a portion of the first substrate. The mirror plate has an upper surface and a lower surface. The method further includes forming a hinge coupled to the mirror plate and forming a reflective surface coupled to the upper surface of the mirror plate.

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