Film bulk acoustic wave resonator and manufacturing method...

Details Film bulk acoustic wave resonator and manufacturing method... Film bulk acoustic wave resonator and manufacturing method...

2006-04-03

2008-09-09

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C310S360000, C310S365000

Reexamination Certificate

active

07423501

ABSTRACT:
A film bulk acoustic resonator includes a substrate; a lower electrode formed on top of the substrate; a piezoelectric membrane formed on top of the lower electrode and having a crystallographic axis so inclined as to generate a total reflection when an acoustic wave advances toward the lower electrode; and an upper electrode formed on top of the piezoelectric membrane.

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patent: 2004/0007940 (2004-01-01), Tsai et al.

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